How to calculate resistivity from sheet resistance?

Sheet resistance (Rs) applies to thin films and is measured in ohms per suare (Ω/□). To calculate resistivity:

ρ = Rs × t

Where:

• ρ = resistivity (Ω·m)
• Rs = sheet resistance (Ω/□)
• t = thickness of the film (m)

Example: If a thin film has sheet resistance of 100 Ω/□ and thickness of 50 nm (5 × 10⁻⁸ m), then ρ = 100 × 5 × 10⁻⁸ = 5 × 10⁻⁶ Ω·m